Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source-Reference-Cited by-同舟云学术

Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source

Published:2014-08-18 Issue:7 Volume:105 Page:074103
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Roy Amitava,Arai Goki,Hara Hiroyuki,Higashiguchi Takeshi,Ohashi Hayato,Sunahara Atsushi,Li Bowen,Dunne Padraig,O'Sullivan Gerry,Miura Taisuke,Mocek Tomas,Endo Akira

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4893611

Reference24 articles.

1. Dynamics of laser-produced Sn microplasma for a high-brightness extreme ultraviolet light source

2. Stress evolution in Mo/Si multilayers for high-reflectivity extreme ultraviolet mirrors

3. Laser-produced plasma light source for extreme-ultraviolet lithography applications

4. Extreme-ultraviolet phase-shifting point-diffraction interferometer: a wave-front metrology tool with subangstrom reference-wave accuracy

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