Anomalous interfacial diffusion in immiscible metallic multilayers: a size-dependent kinetic approach
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1920413
Reference23 articles.
1. Ultrathin Diffusion Barriers/Liners for Gigascale Copper Metallization
2. Modelling Cu Diffusion into a Ta Barrier
3. Tantalum‐based diffusion barriers in Si/Cu VLSI metallizations
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5. Diffusion barrier effects of transition metals for Cu/M/Si multilayers (M=Cr, Ti, Nb, Mo, Ta, W)
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