Non-destructive patterning of 10 nm magnetic island array by phase transformation with low-energy proton irradiation

Author:

Dutta Tanmay12,Pathak Sachin3,Asbahi Mohamed2,Celik Kubra4ORCID,Lee Jong Min1,Yang Ping5,Saifullah M. S. M.2,Oral Ahmet6,Bhatia C. S.1,Cha Jongin3,Hong Jongill3,Yang Hyunsoo1

Affiliation:

1. Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore, Singapore 117576

2. Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-03 Innovis, Singapore, Singapore 138634

3. Material Science Engineering, Yonsei University, 50 Yonsei, Seodaemun, Seoul 03722, South Korea

4. Department of Material Science and Engineering, İstanbul Technical University, 34469 Istanbul, Turkey

5. Singapore Synchrotron Light Source, National University of Singapore, 5 Research Link, Singapore, Singapore 117603

6. Department of Physics, Middle East Technical University, 06800 Ankara, Turkey

Funder

ASTAR

KSRC

Middle east technical university

NRF singapore

SSLS and NUS

Ministry of Trade, Industry and Energy (MOTIE)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

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