Sheath voltage ratio for asymmetric rf discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.348436
Reference8 articles.
1. Plasma potentials of 13.56‐MHz rf argon glow discharges in a planar system
2. Plasma potentials of 13.56‐MHz rf argon glow discharges in a planar system
3. Particle simulation of bounded 1D plasma systems
4. Model of rf discharges at frequencies greater than the ionic plasma frequency
5. Spherical shell model of an asymmetric rf discharge
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