Picosecond photoelectron scanning electron microscope for noncontact testing of integrated circuits
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.98596
Reference8 articles.
1. High‐speed circuit measurements using photoemission sampling
2. High‐speed electrical sampling by fs photoemission
3. Noninvasive sheet charge density probe for integrated silicon devices
4. Voltage distributions in X-band n+-n-n+Gunn devices using a SEM
5. Electron beam blanking systems
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