Fabrication of 5-20 nm thick β-W films
Author:
Affiliation:
1. College of Nanoscale Science and Engineering, University at Albany, SUNY, Albany, New York 12203, USA
Funder
Semiconductor Research Corporation (SRC)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://scitation.aip.org/deliver/fulltext/aip/journal/adva/4/11/1.4903165.pdf?itemId=/content/aip/journal/adva/4/11/10.1063/1.4903165&mimeType=pdf&containerItemId=content/aip/journal/adva
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