Optical spectroscopic study of the growth dynamics of radio‐frequency‐sputtered YBa2Cu3O7−xthin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.108193
Reference9 articles.
1. Superconductivity and resputtering effects in rf sputtered YBa2Cu3O7−xthin films
2. Resputtering effects on the stoichiometry of YBa2Cu3Oxthin films
3. Absence of negative ion effects during on‐axis single target sputter depositions of Y‐Ba‐Cu‐O thin films on Si (100)
4. Optical plasma monitoring of Y‐Ba‐Cu‐O rf sputter target transients
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