Optical plasma monitoring of Y‐Ba‐Cu‐O rf sputter target transients
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.102368
Reference13 articles.
1. The influence of radio frequency sputter variables on the composition of YBa2Cu3O7 films
2. Superconductivity and resputtering effects in rf sputtered YBa2Cu3O7−xthin films
3. Reliable single‐target sputtering process for high‐temperature superconducting films and devices
4. Annealing studies of YBa2Cu3O7−xthin films
5. Microstructure and properties of superconducting sputter deposited Y–Ba–Cu–O films
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2. Process-kinetics in facing targets sputtering of multi-component oxide thin films;Thin Solid Films;1999-06
3. Study of the processes occurring when sputtering YBa2Cu3O7 − x in pure oxygen;Vacuum;1998-03
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5. Effects of He Gas Addition on the Production of Active Particles in rf Magnetron Sputtering;Japanese Journal of Applied Physics;1996-06-15
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