Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates
Author:
Affiliation:
1. QuTech Advanced Research Center and Kavli Institute of Nanosicence, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands
Funder
Dutch Organization for Fundamental Research on Matter (FOM)
Marie Curie Career Integration Grant
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4919761
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