Fabrication of GaAs symmetric pyramidal mesas prepared by wet-chemical etching using AlAs interlayer
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1421626
Reference9 articles.
1. III–V micromachined devices for microsystems
2. Gallium arsenide as a mechanical material
3. Fabrication of GaAs Microtips for Scanning Tunneling Microscopy by Wet Etching
4. Fabrication of quantum wires in thermally etched V-grooves by molecular beam epitaxy
5. Wet Chemical Etching of Alignment V‐Grooves in (100) InP through Titanium or In0.53Ga0.47As Masks
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