Plasmonic nitridation of SiO2/Si(100) surface covered with gold nanoparticles via nitrogen plasma-produced radicals and light
Author:
Affiliation:
1. Department of Electric and Electronic Engineering, National Defense Academy, 1-10-20 Hashirimizu, Yokosuka, Kanagawa 239-8686, Japan
Funder
Japan Society for the Promotion of Science
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/5.0006841
Reference54 articles.
1. Moore's law: the future of Si microelectronics
2. Simulation of intrinsic parameter fluctuations in decananometer and nanometer-scale MOSFETs
3. Nanoscale silicon MOSFETs: A theoretical study
4. Silicon Device Scaling to the Sub-10-nm Regime
5. A 30 Year Retrospective on Dennard's MOSFET Scaling Paper
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Plasmonic Plasma Deposition Using Nanostructured Materials on Si Substrates;Vacuum and Surface Science;2024-02-10
2. Importance of higher‐level excited species in argon remote plasma sources: Numerical modeling with consideration of detailed chemical reaction pathways;Plasma Processes and Polymers;2022-03-24
3. Plasmonic nitriding of graphene on a graphite substrate via gold nanoparticles and NH3/Ar plasma;Journal of Vacuum Science & Technology A;2020-12
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3