Adjustable emissions from silicon-rich oxide films prepared by plasma-enhanced chemical-vapor deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.123836
Reference11 articles.
1. Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers
2. Blue photoluminescence and local structure of Si nanostructures embedded in SiO2 matrices
3. Effect of different preparation conditions on light emission from silicon implanted SiO2 layers
4. A comparative study of ultraviolet emission with peak wavelengths around 350 nm from oxidized porous silicon and that from SiO2 powder
5. Room‐temperature visible photoluminescence from silicon‐rich oxide layers deposited by an electron cyclotron resonance plasma source
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