Design of a fast electron beam scanning system for compact synchrotron light sources-Reference-Cited by-同舟云学术

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Design of a fast electron beam scanning system for compact synchrotron light sources

Published:1989-07 Issue:7 Volume:60 Page:1771-1774
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Moser H. O.,Lehr H.

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1140950

Reference3 articles.

1. Bessy Reaches Full Scale Operation

2. An Electron Undulating Ring for VLSI Lithography

3. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

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