Determination of the composition and thickness of borophosphosilicate glass films by infrared ellipsometry
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.112081
Reference7 articles.
1. Quantitative Analysis of Infrared Reflection Spectra from Phosphosilicate Glass Films
2. Partial least-squares methods for spectral analyses. 1. Relation to other quantitative calibration methods and the extraction of qualitative information
3. Phase modulated ellipsometry from the ultraviolet to the infrared: In situ application to the growth of semiconductors
4. Infrared phase-modulated ellipsometer for in-situ characterization of surfaces and thin films
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Observation of a leaky wave guide resonance mode in polycrystalline silicon structures using infrared spectroscopic ellipsometry;Applied Physics Letters;1998-10-19
2. Spectroscopic ellipsometry in the infrared range;Thin Solid Films;1998-02
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