Subject
General Physics and Astronomy
Cited by
8 articles.
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1. High stability microwave discharge ion sources;Scientific Reports;2022-02-23
2. Plasma cathode oxygen‐ion source;Review of Scientific Instruments;1991-12
3. Ion source with plasma cathode for ion assisted deposition;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02
4. Plasma filament ion source for high current implanter;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1987-01
5. Microwave ion source for ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1987-01