Development of atomic force microscopy combined with scanning electron microscopy for investigating electronic devices-Reference-Cited by-同舟云学术

Development of atomic force microscopy combined with scanning electron microscopy for investigating electronic devices

Published:2019-11-01 Issue:11 Volume:9 Page:115011
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Uruma Takeshi¹^ORCID,Tsunemitsu Chiaki²,Terao Katsuki²,Nakazawa Kenta²^ORCID,Satoh Nobuo³^ORCID,Yamamoto Hidekazu³,Iwata Futoshi¹²^ORCID

Affiliation:

1. Department of Optoelectronics and Nanostructure Science, Graduate School of Science and Technology, Educational Division, Shizuoka University, Hamamatsu, Shizuoka 432-8561, Japan

2. Graduate School of Mechanical Engineering, Shizuoka University, Hamamatsu, Shizuoka 432-8561, Japan

3. Faculty of Engineering, Chiba Institute of Technology, Narashino, Chiba 275-0016, Japan

Funder

Japan Society for the Promotion of Science

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5125163

Reference44 articles.

1. Atomic Force Microscope

2. Atomic force microscope–force mapping and profiling on a sub 100‐Å scale

3. Distinguishing magnetic and electrostatic interactions by a Kelvin probe force microscopy–magnetic force microscopy combination

4. Simultaneous observation of surface topography and elasticity at atomic scale by multifrequency frequency modulation atomic force microscopy

5. In situObservation of Surface Reconstruction of Si(001) with Stress/Strain Field Scanning Probe Microscopy

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2. Imaging of an Electret Film Fabricated on a Micro-Machined Energy Harvester by a Kelvin Probe Force Microscope;IEEE Transactions on Instrumentation and Measurement;2022

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