Design and control of a nanoprecision XYΘ scanner
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2902276
Reference11 articles.
1. An ultraprecision stage for alignment of wafers in advanced microlithography
2. A motor-piezo actuator for nano-scale positioning based on dual servo loop and nonlinearity compensation
3. Design and control of a dual-stage feed drive
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