Design process of square column-shaped voice coil motor for magnetic levitation stage

Author:

Ahn Dahoon1,Kim Hyunchang2,Choi Kyungwho3,Choi Young-Man4,Lim Jae-Yong5

Affiliation:

1. , Kongju National University, , , , Republic of Korea

2. , Korea Institute of Machinery and Materials, , , Republic of Korea

3. Korea Railroad Research Institute, , , , Repulbic of Korea

4. , Ajou University, , , , Republic of Korea

5. , Seoul National University of Science and Technology, , , Republic of Korea

Publisher

IOS Press

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. A six-degree-of-freedom magnetically levitated variable compliance fine-motion wrist: Design, modeling, and control;Hollis;IEEE Transactions on Robotics and Automation,1991

2. Linear motor-leviated stage for photolithography;Kim;CIRP Annals - Manufacturing Technology,1997

3. Six-axis nanopositioning device with precision magnetic levitation technology;Verma;IEEE/ASME Transactions on Mechatronics,2004

4. Multi-axis maglev nanopositioner for precision manufacturing and manipulation applications;Verma;IEEE Transactions on Industry Applications,2005

5. Multiaxis maglev positioner with nanometer resolution over extended travel range;Kim;Journal of Dynamic Systems, Measurement, and Control,2007

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