Thermally stable ohmic contacts ton‐type GaAs. VIII. Sputter‐deposited InAs contacts
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.346509
Reference26 articles.
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3. Extremely Low Resistance Non-Alloyed Ohmic Contacts to n-GaAs Using Compositionally Graded InxGa1-xAs Layers
4. Improved AlGaAs/GaAs HBT performance by InGaAs emitter cap layer
5. HEMT with nonalloyed ohmic contacts using n+-InGaAs cap layer
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2. Ohmic Contacts for Compound Semiconductors;Critical Reviews in Solid State and Materials Sciences;1998-03
3. InxGa1 − xAs-based Ohmic contacts to n-type GaAs with W-nitride barrier prepared by radio frequency sputtering;Applied Surface Science;1997-06
4. InxGa1−xAs ohmic contacts to n-type GaAs with a tungsten nitride barrier;Journal of Electronic Materials;1997-04
5. Effects of deposition sequence on electrical properties of InAs–Ni–W Ohmic contacts to n-type GaAs;Materials Transactions, JIM;1996
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