Structural and optical properties of hydrogenated amorphous silicon carbide deposited by glow discharge from C3H8‐SiH4‐H2mixture
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.352007
Reference21 articles.
1. Properties and structure ofa‐SiC:H for high‐efficiencya‐Si solar cell
2. Properties of hydrogenated amorphous silicon carbide films prepared by plasma-enhanced chemical vapor deposition
3. a‐SiC:H/a‐Si:H heterojunction solar cell having more than 7.1% conversion efficiency
4. Electron-diffraction study of chemical ordering in glow-dischargea-Si1−xCx:H
5. Optical constants of a series of amorphous hydrogenated silicon-carbon alloy films: Dependence of optical response on film microstructure and evidence for homogeneous chemical ordering
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