Two‐dimensional ion velocity distribution functions in electron cyclotron resonance plasma under a divergent magnetic field
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.355212
Reference13 articles.
1. Electron cyclotron resonance microwave discharges for etching and thin‐film deposition
2. Low‐energy ion extraction with small dispersion from an electron cyclotron resonance microwave plasma stream
3. Charged particle densities and energy distributions in a multipolar electron cyclotron resonant plasma etching source
4. Ion energetics in electron cyclotron resonance discharges
5. Doppler profile measurement of Ar and Ar+translational energies in a divergent magnetic field electron cyclotron resonance source
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