Effect of carrier confinement on the laser‐induced etching of GaAs/AlGaAs heterostructures
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.101696
Reference11 articles.
1. Laser-Assisted Selective Chemical Etching of GaAs/AlGaAs Layered Structures
2. Selective Photoetching of Gallium Arsenide
3. Interaction of deep-ultraviolet laser light with GaAs surfaces in aqueous solutions
4. Waveguiding effects in laser‐induced aqueous etching of semiconductors
5. Temperature rise induced by a laser beam
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