Combinatorial synthesis of non-stoichiometric SiOx thin films via high-throughput reactive sputtering-Reference-Cited by-同舟云学术

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Combinatorial synthesis of non-stoichiometric SiOx thin films via high-throughput reactive sputtering

Published:2021-04-21 Issue:15 Volume:129 Page:155309
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Park Jihun¹²^ORCID,Shin Sang Ho²^ORCID,Bae Jong-Seong³^ORCID,Zhang Xiaohang¹^ORCID,Takeuchi Ichiro¹,Lee Seunghun⁴^ORCID

Affiliation:

1. Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, USA

2. R&D Center, SFA Engineering, Hwaseong 18472, South Korea

3. Busan Center, Korea Basic Science Institute, Busan 46742, South Korea

4. Department of Physics, Pukyong National University, Busan 48513, South Korea

Funder

Pukyong National University

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0045152

Reference48 articles.

1. Atomic-scale imaging of nanoengineered oxygen vacancy profiles in SrTiO3

2. Oxygen-Mediated Diffusion of Oxygen Vacancies on the TiO 2 (110) Surface

3. Oxygen vacancies in ZnO

4. In Situ Method Correlating Raman Vibrational Characteristics to Chemical Expansion via Oxygen Nonstoichiometry of Perovskite Thin Films

5. Effects of Al doping on the magnetic properties of ZnCoO and ZnCoO:H

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1. Nanoscale paraffin layer fabricated using spin coating technique for on-demand removable passivation;Progress in Organic Coatings;2023-10

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