Evidence on simultaneous improvement of motional impedance and Q-factor of silicon phononic crystal micromechanical resonators by variously engineering the cavity defects-Reference-Cited by-同舟云学术

Evidence on simultaneous improvement of motional impedance and Q-factor of silicon phononic crystal micromechanical resonators by variously engineering the cavity defects

Published:2014-03-07 Issue:9 Volume:115 Page:094904
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Wang Nan,Hsiao Fu-Li,Palaniapan Moorthi,Lee Chengkuo

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4867044

Reference32 articles.

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2. AFM characterization of out-of-plane high frequency microresonators

3. VHF free-free beam high-Q micromechanical resonators

4. High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps

5. 5.4-MHz single-crystal silicon wine glass mode disk resonator with quality factor of 2 million

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