Measurement of electron density using reactance cutoff probe-Reference-Cited by-同舟云学术

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Measurement of electron density using reactance cutoff probe

Published:2016-05 Issue:5 Volume:23 Page:053515
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

You K. H.¹,You S. J.²^ORCID,Kim D. W.³,Na B. K.⁴,Seo B. H.¹,Kim J. H.¹,Seong D. J.¹,Chang H. Y.⁴

Affiliation:

1. Center for Vacuum Technology, Korea Research Institute of Standards and Science, Daejeon 34113, South Korea

2. Department of Physics, Chungnam National University, Daejeon 34134, South Korea

3. Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141, South Korea

4. Department of Physics, Korea Advanced Institute of Science and Technology, Daejeon 34141, South Korea

Funder

Chungnam National University (CNU)

Korea Research Institute of Standards and Science (KRISS)

National Research Foundation of Korea (NRF)

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4951029

Reference24 articles.

1. Plasma Absorption Probe for Measuring Electron Density in an Environment Soiled with Processing Plasmas

2. Plasma Oscillation Method for Measurements of Absolute Electron Density in Plasma

3. Experimental Characterisation of the Plasma Absorption Probe

4. Microwave resonator probe for localized density measurements in weakly magnetized plasmas

5. A novel technique for plasma density measurement using surface-wave transmission spectra

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Analysis on crossing frequency in transmission microwave frequency spectrum of the cutoff probe;Physics of Plasmas;2023-02-01

2. Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics;Sensors;2022-07-22

3. An electrostatic model of the cutoff probe;Current Applied Physics;2022-07

4. Importance of higher‐level excited species in argon remote plasma sources: Numerical modeling with consideration of detailed chemical reaction pathways;Plasma Processes and Polymers;2022-03-24

5. Crossing Frequency Method Applicable to Intermediate Pressure Plasma Diagnostics Using the Cutoff Probe;Sensors;2022-02-08

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