Phase and amplitude sensitive scanning microwave microscopy/spectroscopy on metal–oxide–semiconductor systems
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3702580
Reference20 articles.
1. Scanning surface harmonic microscopy: Scanning probe microscopy based on microwave field‐induced harmonic generation
2. Quantitative two‐dimensional dopant profile measurement and inverse modeling by scanning capacitance microscopy
3. Real-time imaging of semiconductor space-charge regions using high-spatial resolution evanescent microwave microscope
4. Comparison of SiO2 and HfO2∕SiO2 gate stacks electrical behaviour at a nanometre scale with CAFM
5. Statistics of electrical breakdown field in HfO2 and SiO2 films from millimeter to nanometer length scales
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