Ion‐assisted pulsed‐laser deposition
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1146496
Reference21 articles.
1. Technology of Electron-Bombardment Ion Thrusters
2. Use of ion beam assisted deposition to modify the microstructure and properties of thin films
3. Modification of the optical and structural properties of dielectric ZrO2films by ion‐assisted deposition
4. Effect of ion bombardment on the initial stages of thin film growth
5. Ion-beam-induced texture formation in vacuum-condensed thin metal films
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