Heating power at the substrate, electron temperature, and electron density in 2.45 GHz low-pressure microwave plasma
Author:
Affiliation:
1. Laboratoire Diagnostics des Plasmas Hors Equilibre, Université de Toulouse, INU Champollion, Place de Verdun, 81012 Albi cedex 9, France
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5005592
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