Effects of radio-frequency driving power, gas pressure, and nitrogen seeding on the transition dynamics in argon inductively coupled plasmas
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1790066
Reference12 articles.
1. Characterization of the E to H transition in a pulsed inductively coupled plasma discharge with internal coil geometry: bi-stability and hysteresis
2. Hysteresis and the E-to-H transition in radiofrequency inductive discharges
3. Transition between capacitive and inductive mode in inductively coupled plasma observed by emission computerized tomography
4. Dynamics of mode transitions in inductively-coupled plasmas
5. On the E - H mode transition in RF inductive discharges
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