Intrinsic stress and hydrogen bonding in glow‐discharge amorphous silicon films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.336887
Reference21 articles.
1. Effect of silane dilution on intrinsic stress in glow discharge hydrogenated amorphous silicon films
2. Hydrogen-related mechanical stress in amorphous silicon and plasma-deposited silicon nitride
3. Effect of Deposition Conditions on Intrinsic Stress in a-Si: H Films
4. Fabrication of a New Multilayered Amorphous Silicon Photoreceptor Drum by Glow Discharge Method
5. Fabrication of Amorphous Silicon Devices on Plastic Substrates
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