Energy dissipation in a thin polymer film by electron beam scattering: Experiment
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.321929
Reference9 articles.
1. Energy dissipation in a thin polymer film by electron beam scattering
2. NEW METHOD OF OBSERVING ELECTRON PENETRATION PROFILES IN SOLIDS
3. Computer-controlled resist exposure in the scanning electron microscope
4. Scattering of Highly Focused Kilovolt Electron Beams by Solids
5. An exposure model for electron-sensitive resists
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