Electron beam assisted chemical vapor deposition of SiO2
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.94502
Reference13 articles.
1. Passivation Coatings on Silicon Devices
2. Advances in deposition processes for passivation films
3. Advances in deposition processes for passivation films
4. The step coverage of undoped and phosphorus-doped SiO2 glass films
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