Precursors for direct-write nanofabrication with electrons-Reference-Cited by-同舟云学术

Precursors for direct-write nanofabrication with electrons

Published:2020 Issue:45 Volume:8 Page:15884-15919
ISSN:2050-7526
Container-title:Journal of Materials Chemistry C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Barth Sven¹²³⁴^ORCID,Huth Michael¹²³⁴^ORCID,Jungwirth Felix¹²³⁴^ORCID

Affiliation:

1. Goethe-Universität Frankfurt

2. Physikalisches Institut

3. 60438 Frankfurt am Main

4. Germany

Abstract

The influence of precursor's chemical composition and side reactions on materials obtained by direct nanoprinting using FEBID techniques is discussed.

Funder

Deutsche Forschungsgemeinschaft

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2020/TC/D0TC03689G

Reference250 articles.

1. Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review

2. Focused electron beam induced deposition meets materials science

3. Gas-assisted focused electron beam and ion beam processing and fabrication

4. Focused electron beam induced deposition: A perspective

5. 3D nanoprinting via focused electron beams

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