Diagnostic characterization of ablation plasma ion implantation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1565822
Reference15 articles.
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4. Plasma immersion ion implantation doping using a microwave multipolar bucket plasma
5. Large-scale implantation and deposition research at Los Alamos National Laboratory
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