Model for noncollisional heating in inductively coupled plasma processing sources
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.364385
Reference25 articles.
1. Electron‐density and energy distributions in a planar inductively coupled discharge
2. Nonlocal electron kinetics in a low‐pressure inductively coupled radio‐frequency discharge
3. Electromagnetic fields in a radio‐frequency induction plasma
4. Langmuir probe measurements of a radio frequency induction plasma
5. Ion bombardment energy distributions in a radio frequency induction plasma
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