Anisotropic pyrochemical dry etching of fluorinated ethylene propylene induced by pre-irradiation with synchrotron radiation
Author:
Affiliation:
1. University of Hyogo, 3-1-2 Kouto, Kamigori, Ako, Hyogo 678-1205, Japan
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/6.0000702
Reference19 articles.
1. Microfluidic diagnostic technologies for global public health
2. Whole-Teflon microfluidic chips
3. Wafer-scale fabrication of glass-FEP-glass microfluidic devices for lipid bilayer experiments
4. Covalent immobilisation of antibodies in Teflon-FEP microfluidic devices for the sensitive quantification of clinically relevant protein biomarkers
5. Fabrication of Microchannel Structures in Fluorinated Ethylene Propylene
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1. Soft X-ray microspectroscopic imaging studies of exfoliated surface between fluoropolymer and Cu plate directly bonded by plasma irradiation with ammonia gas;Journal of Electron Spectroscopy and Related Phenomena;2023-08
2. In situ synchrotron X-ray scission of polytetrafluoroethylene chains and elucidation of dry etching;Heliyon;2023-05
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