Author:
Yamaguchi A.,Ikeda S.,Nakaya M.,Kobayashi Y.,Haruyama Y.,Suzuki S.,Kanda K.,Utsumi Y.,Ohkochi T.,Sumida H.,Oura M.
Funder
Japan Society for the Promotion of Science
Tokyo Ohka Foundation for The Promotion of Science and Technology
Hyogo Science and Technology Association
Amano Institute of Technology
Subject
Physical and Theoretical Chemistry,Spectroscopy,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Radiation,Electronic, Optical and Magnetic Materials
Reference51 articles.
1. Low dielectric constant polymers for high speed communication network;Wang;Adv. Ind. Eng. Polym. Res.,2020
2. On the mechanism of polytetrafluoroethylene ablation using a synchrotron radiation-induced photochemical process;Nagai;Appl. Surf. Sci.,2001
3. High aspect ratio micromachining by synchrotron radiation direct photo-etching
4. Fabrication of poly(tetorafluoroethylene) Microparts by High-Energy X-ray-Induced Etching;Ukita;Jpn. J. Appl. Phys.,2008
5. Application of photo-etching of polytetrafluoroethylene induced by high energy synchrotron radiation to LIGA;Kido;Micro Technol.,2013