Effects of hydrogen passivation on the electrical conduction in undoped polycrystalline silicon films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.364216
Reference15 articles.
1. Hydrogenation of transistors fabricated in polycrystalline-silicon films
2. Passivation kinetics of two types of defects in polysilicon TFT by plasma hydrogenation
3. Increase in photoconductivity of polycrystalline silicon by plasma annealing
4. Enhanced conductivity in plasma‐hydrogenated polysilicon films
5. Doping effects on conductivity and electron spin resonance in post‐hydrogenated polycrystalline silicon
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2. Study of deposition temperature on high crystallinity nanocrystalline silicon thin films with in-situ hydrogen plasma-passivated grains;Thin Solid Films;2015-12
3. High-performance n-channel 13.56MHz plasma-enhanced chemical vapor deposition nanocrystalline silicon thin-film transistors;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2006-05
4. Spontaneous decrease of high surface electrical conductivity in diamond exposed to atmospheric air;Chemical Physics Letters;2004-06
5. Low temperature polycrystalline silicon: a review on deposition, physical properties and solar cell applications;Solar Energy Materials and Solar Cells;2003-04
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