A novel spatial-distribution-function of electron beam-induced vapor plume for analyzing EBPVD thickness-Reference-Cited by-同舟云学术

A novel spatial-distribution-function of electron beam-induced vapor plume for analyzing EBPVD thickness

Published:2018-08 Issue:8 Volume:8 Page:085108
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Ho Ching-Yen¹²^ORCID,Chen Bor-Chyuan³,Xiong Chang-Wei¹,Fan Si-Li¹,Wan Song-Feng¹,Li Long-Gen¹,Shu Yu-Feng¹,Yu Xiao-Qiong¹

Affiliation:

1. Department of Mechanical and Electrical Engineering, Dongguan Polytechnic, Dongguan 523808, Guangdong, China

2. Department of Mechanical Engineering, Hwa Hsia University of Technology, Taipei 235, Taiwan, R.O.C

3. Department of Chinese Medicine, Buddhist Dalin Tzu Chi General Hospital, Chiayi 622, Taiwan, R.O.C

Funder

Ministry of Science and Technology

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5037826

Reference18 articles.

1. Analytical study on deep penetration induced by focused moving high-energy beam

2. A spatial distribution study of a beam vapour emitted by electron-beam-heated evaporation sources

3. High‐rate vapor deposition and large systems for coating processes

4. J. Fan, I. D. Boyd, and C. Shelton, “Monte Carlo modeling of YBCO deposition,” Rarefied Gas Dynamics, edited by T. J. Bartel and M. A. Gallis, AIP Conference Proceedings No. 585, 214–221 (2001).

5. Experimental and theoretical studies of coating thickness distributions obtained from high rate electron beam evaporation sources

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