Stress tuning in crystal ion slicing to form single-crystal potassium tantalate films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1314294
Reference8 articles.
1. Epitaxial liftoff of thin oxide layers: Yttrium iron garnets onto GaAs
2. Fabrication of single-crystal lithium niobate films by crystal ion slicing
3. Silicon on insulator material technology
4. Domain formation and strain relaxation in epitaxial ferroelectric heterostructures
5. Anharmonic Effects in KTaO3: Ferroelectric Mode, Thermal Expansion,and Compressibility
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1. Wafer-Scale Fabrication of 42° Rotated Y-Cut LiTaO3-on-Insulator (LTOI) Substrate for a SAW Resonator;ACS Applied Electronic Materials;2019-07-12
2. Visualized strain profile in the process of crystal ion slicing of LiTaO3;Journal of Physics D: Applied Physics;2016-04-15
3. Planar single-crystal thin-films of YAG obtained by ion implantation and thermal exfoliation: Mechanical properties;Optical Materials;2012-11
4. Oxide heterogrowth on ion-exfoliated thin-film complex oxide substrates;Thin Solid Films;2009-11
5. X-ray microbeam probing of elastic strains in patterned He+ implanted single-crystal LiNbO3;Applied Physics Letters;2007-09-10
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