Quantitative determination of hydrogen in silicon‐nitride films using proton‐proton scattering
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.91317
Reference4 articles.
1. Analyses for stoichiometry and for Hydrogen and Oxygen in silicon nitride films
2. Hydrogen concentration profiles and chemical bonding in silicon nitride
3. Nondestructive Analysis for Trace Amounts of Hydrogen
4. A Water-Amine-Complexing Agent System for Etching Silicon
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