Author:
Zhou Zai-Fa,Huang Qing-An,Li Wei-Hua
Subject
Physics and Astronomy (miscellaneous)
Reference19 articles.
1. M. Madou, Foundamentals of Microfabrication (CRC, Boca Raton, FL, 1997), Chap. 14, p. 145.
2. C. Liu, Foundations of MEMS (Prentice-Hall, Eaglewood Cliffs, NJ, 2006), Chap 10, p. 326.
3. ASEP: a CAD program for silicon anisotropic etching
4. Computer simulation of anisotropic crystal etching
5. Convex corner undercutting of {100} silicon in anisotropic KOH etching: the new step-flow model of 3-D structuring and first simulation results
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