Competition between tensile and compressive stress mechanisms during Volmer-Weber growth of aluminum nitride films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1994944
Reference29 articles.
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3. The dynamic competition between stress generation and relaxation mechanisms during coalescence of Volmer–Weber thin films
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5. MRS Symposia Proceedings Vol. 505;Nijhawan S.,1998
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