The internal stress in thin silver, copper and gold films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Structure and internal stress in ultra-thin silver films deposited on MgF2 and SiO substrates
2. Internal stress of thin silver and gold films and its dependence on gas adsorption
3. In situ determination of the structure of thin metal films by internal stress measurements: Structure dependence of silver and copper films on oxygen pressure during deposition
4. R. Koch, H. Leonhard and R. Abermann, to be published.
5. On the influence of thermal effects on internal stress measurements during and after deposition of silver, gold and copper films
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