Two-dimensional self-consistent microwave argon plasma simulations with experimental verification
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1577810
Reference8 articles.
1. Radio frequency or microwave plasma reactors? Factors determining the optimum frequency of operation
2. Diagnostics and modeling in a pure argon plasma: Energy balance study
3. The importance of electron-molecule interactions in free-free continuum emission for microwave discharge CVD
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5. ELENDIF: A time-dependent Boltzmann solver for partially ionized plasmas
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1. 3-D Numerical Characterization of a Microwave Argon PECVD Plasma Reactor at Low Pressure;IEEE Transactions on Plasma Science;2016-12
2. Understanding Microwave Surface-Wave Sustained Plasmas at Intermediate Pressure by 2D Modeling and Experiments;Plasma Processes and Polymers;2016-11-17
3. Modeling of microwave-induced plasma in argon at atmospheric pressure;Physical Review E;2012-05-15
4. Microwave plasma chemical vapor deposition of graphitic carbon thin films;Carbon;2010-04
5. Modelling of diamond deposition microwave cavity generated plasmas;Journal of Physics D: Applied Physics;2010-03-30
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