Understanding Microwave Surface-Wave Sustained Plasmas at Intermediate Pressure by 2D Modeling and Experiments

Author:

Georgieva Violeta12,Berthelot Antonin2,Silva Tiago3,Kolev Stanimir24,Graef Wouter5,Britun Nikolay3,Chen Guoxing13,van der Mullen Joost1,Godfroid Thomas6,Mihailova Diana5,van Dijk Jan5,Snyders Rony36,Bogaerts Annemie2,Delplancke-Ogletree Marie-Paule1

Affiliation:

1. Université Libre de Bruxelles, École Polytechnique de Bruxelles; Service 4MAT, av. F.D. Roosevelt 50-CP 165/63, 1050; Brussels Belgium

2. Department of Chemistry, Research Group PLASMANT; University of Antwerp, Universiteitsplein 1, B-2610; Wilrijk-Antwerp Belgium

3. Université de Mons, ChIPS, av. Nicolas Copernic 1, 7000; Mons Belgium

4. Faculty of Physics, Sofia University; Blvd “James Bourchier” 5, 1164; Sofia Bulgaria

5. Department of Applied Physics, Research Group EPG; Eindhoven University of Technology, P.O. Box 513, 5600 MB; Eindhoven the Netherlands

6. Materia Nova Research Center; av. Nicolas Copernic 1, 7000; Mons Belgium

Funder

Federaal Wetenschapsbeleid

European Marie Curie RAPID project

European Union's Seventh Framework Programme

Publisher

Wiley

Subject

Polymers and Plastics,Condensed Matter Physics

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