Oxidation of silicon surfaces by CO2lasers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.93439
Reference22 articles.
1. Laser microphotochemistry for use in solid-state electronics
2. Dynamics of laser‐induced formation of palladium silicide
3. Dynamics of laser‐induced formation of palladium silicide
4. Laser annealing for solid‐phase thin‐film reactions
5. Laser chemical technique for rapid direct writing of surface relief in silicon
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