Laser annealing for solid‐phase thin‐film reactions
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.90737
Reference9 articles.
1. Processing materials with lasers
2. Lattice location of Te in laser-annealed Te-implanted silicon
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4. Theoretical analysis of thermal and mass transport in ion‐implanted laser‐annealed silicon
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