Efficient keV x‐ray emission from plasmas generated with 4 ps KrF excimer laser pulses
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110253
Reference19 articles.
1. X-ray lithography using a KrF laser–plasma source
2. X-ray lithography using a KrF laser-plasma source at hν ≈ 1 keV
3. X-ray lithography with efficient picosecond KrF laser-plasma source at 1nm wavelength
4. Debris and VUV emission from a laser-produced plasma operated at 150 Hz using a krypton fluoride laser
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