Iron gettering mechanisms in silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.363236
Reference22 articles.
1. Mechanism of internal gettering of interstitial impurities in Czochralski-grown silicon
2. Mechanism of internal gettering of interstitial impurities in Czochralski-grown silicon
3. Electron Spin Resonance in Semiconductors
4. Capacitance Transient Spectroscopy of Trace Contamination in Silicon
5. Transition metals in silicon
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